Zeiss GeminiSEM300
Zeiss
GeminiSEM300
0.1 kV - 30 kV (FEG)
- High vacuum mode (4.8 10e-5 Pa)
- Controled pressure mode (up to 500 Pa)
FEG ( Field Electron Gun) Schottky type
- 2 detectors in column (secondary and backscattered)
- 5 detectors in chamber (secondary for high vacuum, retractable backscattered, secondary and backscattered nano-VP, STEM detector)
0.8 nm @ 15 kV and 1.4 nm @ 1 kV
- In cryo-observation
- Serial Block Face Imaging (SBF)
- Microanalysis X (semi-quantitative analysis ; elementary mapping with Bruker detector)
- Scanning Transmission Electron Microscopy (STEM)